Design of Recycling System for Spent Rinse Water from Sandia's Microelectronics Development Laboratory (MDL)

摘要

The steps taken at Sandia to install a system for recycling spent rinse waters from its semiconductor fab consisted of the following sequence: 1.) Classifying the properties of the water discharged from all fab wet stations; 2.) Installing a drain system and tank to collect discharge waters from those stations deemed most compatible with recycling; 3.) Instrumenting the tank and its feed lines for monitoring the properties of the collected water; 4.) Writing software for data logging and controlling the system operation; and 5.) Collecting data to characterize the water quality and to identify the most favorable node for returning the collected water to the UPW system. Yet to be completed is the final loop that returns the water to the UPW system and completes the recycle installation.