Performance Testing of 0.1μm Rated Microfilters for Ultra Pure Water Applications

摘要

It is critical in microelectronics manufacturing to reduce defects and maximize yield by removing and controlling particulates in all of the process fluids. Sematech's provisional standard test methods SEMASPEC #92010942B-STD and #92010949B-STD with the proposed modifications provides a means to examine the rinse-in characteristics and particle contribution and retention of microfilters employed in ultra pure water (UPW) applications. In this work, particle contribution and particle retention was evaluated for three types of 0.1 μm rated microfilters under steady state and dynamic flow conditions. The results illustrate that the provisional test protocol with the proposed modifications can be utilized to characterize filter performance in UPW systems operating under both steady state and transient conditions. Transient conditions include sharp flow and pressure fluctuations which occur when tools in the Fab call for water and valves and other components are activated.