Physical and optical properties of TiO_2 nanolayers for integrated photonics application

摘要

The paper presents investigation of physical properties of wide bandgap oxide semiconductor - titanium dioxide for applications in integrated photonics as well as for future applications in gas sensors structures. The investigation presented in the paper was focused on: surface topography of TiO_2 layers measured by AFM method, as well as investigation of Raman shift obtained by Raman spectroscopy. Finally the integrated photonics structure in the form of planar waveguide is also presented.