Gravimetric measurements with use of a cantilever for controlling of electrochemical deposition processes

摘要

In this paper we describe the method for monitoring the progress of electrochemical deposition process. The procedure allows to control the deposition of metals as well as conductive polymers on metallic seed layer. The method is particularly useful to very thin layers (1-10 nm) of deposited medium which mechanical or optical methods are troublesome for. In this method deposit is grown on the target and on the test silicon microcantilever with a metal pad. Galvanic deposition on the cantilever causes the change of its mass and consequently the change of its resonance frequency. Changes of the frequency is measured with laser vibrometer then the layer thicknesses can be estimated basing on the cantilever calibration curve. Applying this method for controlling of gold deposition on platinum seed layer, for improving the properties of the biochemical sensors, is described in this paper.