Microano machining of difficult-to-cut materials by applying elliptical vibration cutting

摘要

Textured surfaces with sophisticated microano structures can provide interesting and advanced functions.Nowadays, elliptical vibration cutting (EVC) is attracting more and more attentions due to its excellent machining performances in microano machining of difficult-to-cut materials.By applying single crystal diamond (SCD) tools, ultraprecision texturing of ferrous metals and hard-brittle materials, such as hardened steel, tungsten carbide and single crystal silicon, were carried out by applying EVC.Both the excellent machined surface quality and the high machining accuracy can be guaranteed with this novel method.A series of functional surfaces with sophisticated microano structures were successfully fabricated, which can be applied to the molding, encoder,optoelectronics and semiconductor industries.The EVC technology is expected to promote the development of microano machining process in the actual industrial applications.