APPLICATION OF MICROANALYSIS IN THE VARIABLE PRESSURE SEM: NEW GUIDELINES FOR AN ACCURATE PRACTICE

摘要

To carry out X-ray microanalysis in the VP-SEM needs to measure X-ray spectra specimens given by the X-ray generation volume. Unlike conventional SEM case that the generation volume is unique at a given condition of excitation, in VP-SEM, the generation volume changes even under the same condition of excitation leading to different microanalysis results of the same zone. In this work the relationship between the introduction of the gas in the specimen chamber of GSEM and the microanalysis is evidenced. Three new regimes of the electron scattering are illustrated giving the good guidelines to classify the experimental conditions used in order to well interpret the obtained microanalysis results whatever the gas and the material used.