MITIGATING CHARGING AND BEAM DAMAGE IN EPMA OF NON-CONDUCTIVE MATERIALS

摘要

The characterisation of insulating materials has been a major application of EPMA for the past six decades. A review of the effects of charging and beam damage on non-conductive materials is presented. The charging condition needs to be considered not only in terms of the effects of a conductive coating but also in the sub-surface charging within the sample. Beam damage may be considered the effects of thermal decomposition; element migration and speciation change. The use of different coating materials, cryogenic stage and anti-contaminators permit a degree of mitigation of some of the damaging effects.