首页> 外文会议>11th International Conference on Computational Methods and Experimental Measurements (CMEM 2003) 2003 Halkidiki, Greece >Topography of laminar and oscillatory thermal and thermocapillary convection in a Czochralski process'
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Topography of laminar and oscillatory thermal and thermocapillary convection in a Czochralski process'

机译:切克劳斯基过程中层流和振荡的热和热毛细管对流的形貌

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摘要

The Czochralski process is the most common method for growing large semiconductor mono-crystals. All experiments and measurements for the explanation and optimisation of the process were made on experimental equipment simulating the process at room temperature. In melt thermocapillary, thermal and forced convection are induced according to thermal, kinematical and geometrical boundary conditions. Thermocapillary convection is a boundary driven convection caused by a temperature gradient on the fluid surface. Because of the friction the impulse of the flow is transmitted to deeper fluid layers and the convection is spread through the whole fluid.
机译:Czochralski工艺是生长大型半导体单晶的最常用方法。所有用于解释和优化工艺的实验和测量均在模拟室温下的工艺的实验设备上进行。在熔体热毛细管中,根据热,运动学和几何边界条件引发热对流和强制对流。热毛细管对流是由流体表面温度梯度引起的边界驱动对流。由于摩擦,流动的冲动被传递到更深的流体层,对流在整个流体中扩散。

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