A HIGH-STABLE PRESSURE SENSOR BASED ON A SOI HETEROSTRUCTURE AND MEMS TECHNOLOGY FOR MEASURING AIRCRAFT SPEED-ALTITUDE DATA

摘要

The time stability of pressure transducers is a necessary condition, which provides the measurement and computation of speed-altitude data by an aircraft computer with required accuracy [1], first of all in an autonomous flight mode.rnAs compared with Weston Aerospace up-to-date high-stable electromechanical pressure transducers [2], which use a resonance effect in a vibrating cylinder, semiconductor microelectromechanical sensors (SMEMS) have advantages in possible integration with a signal microprocessor circuit and in group manufacturing based on advanced MEMS technologies [3].rnHoneywell is known to be conducting efforts in replacing electromechanical sensors withrnmicroelectromechanical ones in an aircraft speed-altitude data system [4].rnThe capabilities of measurement error correction using microprocessor techniques for transfer characteristic linearization, temperature compensation and other parameters become significantly complicated due to the instability of the transfer characteristic of conventional SMEMS.rnThe developed concept [5], which eliminates the usage of p-n junctions in SMEMS, forms the basis for the proposed solutions and the principles of developing integral high-stable SOI-based membrane-type pressure sensors with a monolithic tensoframe.