Robust and Miniaturized Interferometric Distance Sensor for In-Situ Turning Process Monitoring

摘要

For in-process shape monitoring of rotating objects such as workpieces in a turning machine, contactless and compact sensors with high temporal resolution as well as high precision are necessary. For this purpose, we developed a miniaturized and robust non-incremental fiberoptic distance sensor with dimensions of only 30×40×90 mm~3, which can be attached to the mount of a turning tool and therefore allows precise in-process 3D shape measurements of turning parts.rnIn this contribution we present the design of the miniaturized sensor supported by optical simulations as well as in-process shape measurements in a turning machine. To proof the accuracy of the measurement results, comparative measurements with tactile sensors were performed.