One-year progress of MEMS hands-on access facility at Tohoku University

摘要

The "Hands-on access fab" is a 4" and 6" facility that companies can easily access and utilize for their prototyping. The fab is shared with other users and managed with best efforts. The fab will not make contract development like MEMS foundry. Companies which have not own facility can dispatch their people to operate equipments by themselves. More than 20 companies have used the fab since the opening in November 2011. The fab targets to make barriers of MEMS development smaller.