Low Toxicity Organic Tertiary and Quaternary Amines and Their Use

摘要

Secondary amine and quaternary ammonium compounds of formula I and / or formula II are provided. The art also provides compositions comprising one or more of compounds that may be useful for electronic device processing (eg, semiconductor processing compositions), cleaning, stripping, degreasing, or combinations thereof. .. Compounds of formula I and / or formula II may be useful as low toxicity substitutes for tetramethylammonium hydroxide.