Adaptive Care Areas for Die-Die Inspection

摘要

This disclosure describes methods, systems, and articles of manufacture for performing defect inspection of a die image using adaptive care areas (ACAs). The use of ACAs includes handling rotations of components that require rotating care areas; handling situations where each care area requires its own rotation, translation, or affine transformation; and decoupling intensity differences caused by defects or process variations from intensity differences caused by size variations.