METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF AN EUV POD

摘要

Method for inspection of an inner pod EIP and/or an outer pod EOP of an EUV pod, respectively including a base member and a cover member, the method comprising acquiring inspection data sets using a line scan camera and an area scan camera, characterized by the following steps: 1. Inspecting the cover member in a first inspection unit using the at least one line scan camera, 2. Inspecting the base member in a second inspection unit using the at least one area scan camera, 3. Inspecting the cover member in the second inspection unit using the at least one area scan camera, and 4. Inspecting the base member in the first inspection unit using the at least one line scan camera.