Moire interferometer measurement system and moire interferometer measurement method using artificial intelligence

摘要

The present invention relates to a moiré interferometer measuring system and a moiré interferometer measuring method using artificial intelligence that can predict the result image by increasing the measurement resolution of the measured image measured by the moiré interferometer through deep learning using artificial intelligence, and to measure a predetermined shape An input unit for inputting a first image having a first resolution measured by a moiré interferometer as input data, and a phase shifting method to increase the measurement resolution of the measured image measured by the moire interferometer to store in advance a deep learning model derived by deep learning at least one result image of which the measurement resolution of the measurement image is increased, and apply the deep learning model to the first image input from the input unit to apply the first A processing unit for predicting a result for a second image having a second resolution higher than the first resolution from the first image having a resolution, and an output unit for outputting the second image predicted by the processing unit as output data there is.