Creep feed grinding equipment and creep feed grinding method

摘要

PROBLEM TO BE SOLVED: To creep feed grind a workpiece so as to have a uniform thickness. At the time of grinding, a grindstone height measuring unit 80 or a grindstone length measuring unit 90 is used to measure the consumption amount of the grinding wheel 77, and the grinding wheel 77 corresponds to the consumption amount of the grinding wheel 77. Is lowered along the Z-axis direction. As a result, the height of the lower surface of the grinding wheel 77 can be maintained even if the grinding wheel 77 is consumed and shortened. Therefore, the distance between the holding surface 32 of the chuck table 31 and the lower surface of the grinding wheel 77, that is, the distance between the back surface 102 of the plate-shaped work 100 held by the holding surface 32 and the lower surface of the grinding wheel 77. Can be made constant. As a result, the plate-shaped work 100 can be creep-fed ground so as to have a uniform thickness without forming irregularities on the back surface 102 of the plate-shaped work 100. [Selection diagram] Fig. 3