EDUCATION OF SELF-RESPONSIBLE UPPER CONTACTS TO MANAGERS

摘要

A method for producing a semiconductor unit comprises: Resetting a first odd-numbered hard mask and a first even-numbered hard mask to form a reset odd-numbered and a reset even-numbered hard mask, forming a first conductive hard mask having a first conductive hard mask material, on the reset odd number hard mask and a second conductive hard mask on the reset even number hard mask and forming self-aligned vias at line ends corresponding to the first odd number and the first even number conductive line,at least partially based on the first and second conductive hard mask.