METHODS FOR COMPENSATING FOR CRYSTAL STRUCTURE DIFFERENTIAL MATERIAL REMOVAL RATES IN SUB-APERTURE FIGURING PROCESSES

摘要

The disclosure relates to methods for compensating for crystal structures differential material removal rates in sub-aperture figuring. A computing machine receives an input related to a substrate crystal structure. The computing machine generates, based on the input, a surface map data capturing the substrate crystal structure. The computing machine generates, based on the surface map data structure, a figuring route data structure for a figuring tool to figure an optical surface on the crystal substrate. The computing machine controls, using the processing circuitry and based on the figuring route data structure, the figuring tool to figure the substrate crystal optical surface.