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SHIELD STRUCTURE FOR PRESSURE SENSOR, AND PRESSURE SENSOR PROVIDED WITH SAME

机译:用于压力传感器的屏蔽结构,以及具有该屏蔽结构的压力传感器

摘要

In a pressure sensor, a cap-shaped shielding member (17) to block an electric field undesirable for a signal processing electronic circuit unit of a sensor chip (16) is supported by an end surface of a disk conductive plate (19) between one end surface of the sensor chip (16) in a liquid sealing chamber (13) and a diaphragm (32). The conductive plate (19) is electrically connected via a group of input-output terminals (40ai) and bonding wires (Wi), for example, and the sensor chip (16) is supported by one end portion of a chip mounting member (18) which is electrically connected via the group of input and output terminals (40ai) and the bonding wires (Wi).
机译:在压力传感器中,用于阻挡传感器芯片(16)的信号处理电子电路单元不需要的电场的帽状屏蔽构件(17)由位于液体密封室(13)中的传感器芯片(16)的一个端面和隔膜(32)之间的盘状导电板(19)的端面支撑。导电板(19)例如经由一组输入输出端子(40ai)和键合线(Wi)电连接,并且传感器芯片(16)由芯片安装构件(18)的一端部分支撑,芯片安装构件(18)经由一组输入输出端子(40ai)和键合线(Wi)电连接。

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