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METAL MIRROR BASED MULTISPECTRAL FILTER ARRAY AND METHOD FOR PREPARING A SENSOR DEVICE WITH A MULTI SPECTRAL FILTER ARRAY
METAL MIRROR BASED MULTISPECTRAL FILTER ARRAY AND METHOD FOR PREPARING A SENSOR DEVICE WITH A MULTI SPECTRAL FILTER ARRAY
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机译:基于金属镜的多光谱滤波器阵列和用于制备具有多光谱滤波器阵列的传感器装置的方法
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摘要
The device may include an array of multispectral filters disposed on a substrate. The multispectral filter array may include a first metal mirror disposed on a substrate. The multispectral filter may include spacers disposed on the first metal mirror. A spacer may comprise a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metallic mirror may be aligned with two or more sensor elements of the set of sensor elements.
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