DEVICE FOR FORMING SEPARATION STARTING POINT, STACK MANUFACTURING APPARATUS, AND METHOD FOR FORMING SEPARATION STARTING POINT

摘要

The present invention provides an apparatus for forming a peeling origin capable of peeling off the surface layer of a processing member to isolate the remainder. Alternatively, there is provided an apparatus for manufacturing a laminate including a support and the remainder of the processing member from which the surface layer has been peeled off. It comprises a stage for supporting the processing member, a cutting tool opposed to the stage, a head for supporting it, an arm for supporting the head, and a moving mechanism for relatively moving the cutting tool with respect to the stage.