Laser-excited ultrasonic generator, laser ultrasonic inspection device, and laser ultrasonic inspection method

摘要

PROBLEM TO BE SOLVED: To provide a laser excitation ultrasonic generator, a laser ultrasonic inspection device, and a method for a laser ultrasonic inspection that can easily control the directivity of an acoustic field excited by emission of a plurality of laser beams.;SOLUTION: A laser excitation ultrasonic generator 10 includes: a laser beam source 11 for outputting a laser beam; a laser division unit 13 for dividing the output laser beam into plural laser beams; and a divided laser emitting unit 16 having an optical system, the optical system adjusting at least one of the shape and the interval of emission of a laser beam emitted to the surface of an emission target according to the incident angle of the divided laser beam, the divided laser emitting unit emitting each of the laser beams caused to enter the optical system to the surface of the emission target and causing the emission target to excite ultrasonic waves.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT