Reflective Fourier ptychographic microscopy with misalignment error correction algorithm

摘要

The present invention relates to a reflective FPM capable of correcting alignment errors and a correction method using the same, and more particularly, a plurality of LED light sources are provided, and a plurality of LEDs are sequentially formed on a measurement object at different angles through an objective lens. a first illuminator having a first panel composed of a first LED array irradiating one beam; a second illuminator having a second panel comprising a second LED array provided with a plurality of LED light sources and sequentially irradiating a plurality of LED second beams to a measurement object at different angles after irradiation by the first illuminator; a condensing lens configured to collect a beam emitted from the measurement object to which the LED first and second beams are irradiated; a photodetector for receiving light from the condensing lens and acquiring images for each of a plurality of first and second beams; and provided between the first illuminator and the objective lens to obtain an image formed on the back focal plane of the objective lens by being irradiated to the measurement object by the first illuminator, and based on the acquired back focal plane image, the It relates to a reflective FPM capable of correcting an alignment error, comprising: an alignment error measuring unit for measuring alignment errors (Δx1, Δy1, Δθ1) of the first illuminator.