UP-TO-STANDARD CHECKING METHOD AND UP-TO-STANDARD CHECKING SYSTEM FOR ADDED DETECTION TOOL

摘要

An up-to-standard checking method and an up-to-standard checking system for an added detection tool. The method comprises: after several wafers to be detected are provided (S21), detecting some of said wafers in a new detection tool to obtain several pieces of first detection data (S22); detecting some of said wafers in an old detection tool to obtain several pieces of second detection data (S23); performing data analysis on the several pieces of first detection data and the several pieces of second detection data to obtain an attributed category corresponding to the several pieces of first detection data and the several pieces of second detection data (S25); and determining whether the first detection data corresponding to each attributed category of the new detection tool is up to standard (S26). By means of the checking method, the up-to-standard checking process of the added new detection tool is standardized and process-oriented, the accuracy of the up-to-standard checking result of the new detection tool is improved, and the efficiency of the up-to-standard checking process of the new detection tool is improved.