YIELD RATE PREDICTION METHOD, YIELD RATE PREDICTION SYSTEM AND MODEL TRAINING DEVICE OF SEMICONDUCTOR MANUFACTURING PROCESS

摘要

A yield rate prediction method, a yield rate prediction system, and a model training device of a semiconductor manufacturing process are provided. The yield rate prediction method of a semiconductor manufacturing process includes the following steps. A correspondence relation between a circuit path of a netlist and an integrated circuit layout is established. Several defective points on several stacking layers are obtained. A recognition model is trained to recognize a fault occurred on the circuit path according to the defective points. A probability of the fault occurred on the circuit path of a semiconductor semi-final product according to the recognition model is recognized. A yield rate of the semiconductor semi-final product is predicted according to the probability.