CONTROLLERS OF A VACUUM PUMPING AND/OR ABATEMENT SYSTEM

摘要

A method of assigning an identifier to a controller of a modular vacuum pumping and/or abatement system, the method including: determining, by a first controller of the modular vacuum pumping and/or abatement system, that a first identifier is to be assigned to a second controller of the modular vacuum pumping and/or abatement system, wherein the second controller is located at a module of the modular vacuum pumping and/or abatement system; transmitting, by the first controller, a first signal indicative of the first identifier to the second controller; receiving, by a user input device coupled to the module, a user input; and adopting, by the second controller, the first identifier as its identifier in response to the user input.