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THETA-THETA SAMPLE POSITIONING STAGE WITH APPLICATION TO SAMPLE MAPPING USING A REFLECTOMETER, SPECTROPHOTOMETER OR ELLIPSOMETER SYSTEM
THETA-THETA SAMPLE POSITIONING STAGE WITH APPLICATION TO SAMPLE MAPPING USING A REFLECTOMETER, SPECTROPHOTOMETER OR ELLIPSOMETER SYSTEM
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机译：θ-theta样品定位阶段，采用施用来采样使用反射计，分光光度计或椭圆仪系统的映射
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摘要
A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage, The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.
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