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Substrate plating method

机译:基板电镀方法

摘要

A substrate plating method includes forming a first resist film exposing a first feeding layer on a first face of a substrate; forming a second resist film exposing a second feeding layer on a second face of the substrate opposite to the first face; holding the substrate with a clamp member in such a manner that the clamp member is in contact with the first feeding layer and the second feeding layer, and arranging a first electrode in opposed relation with the first face and a second electrode in opposed relation with the second face; and forming a plating layer on a plating-scheduled region of the first face under conditions in which a value of current supplied between the second face and the second electrode is larger than a value of current supplied between the first face and the first electrode.
机译:基板镀方法包括在基板的第一面上形成暴露第一馈电层的第一抗蚀剂膜; 形成第二抗蚀剂膜在与第一面的基板的第二面上曝光第二馈电层; 用夹紧构件保持基板,使得夹紧构件与第一进给层和第二进给层接触,并与与第一面和第二电极的相对关系相对地布置第一电极和与 二脸; 在第一面的电镀的镀层调度区域上形成电镀层在第二面和第二电极之间的电流的值大于在第一面和第一电极之间提供的电流的值的条件下。

著录项

  • 公开/公告号US11230779B2

    专利类型

  • 公开/公告日2022-01-25

    原文格式PDF

  • 申请/专利权人 SHINKO ELECTRIC INDUSTRIES CO. LTD.;

    申请/专利号US202016880091

  • 发明设计人 KATSUYA KUBO;

    申请日2020-05-21

  • 分类号C25D3/38;C25D5/02;H05K3/18;

  • 国家 US

  • 入库时间 2022-08-24 23:31:04

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