Diffractometer for Charged Particle Crystallography

摘要

The present invention relates to a diffractometer (1) for charged particle crystallography of a crystalline sample (31), in particular electron crystallography of a crystalline sample (31). The diffractometer 1 is a charged particle source 10 for generating a charged particle beam along a charged particle beam axis 11, a diffraction pattern of the sample 31 based on a charged particle beam transmitted through the sample and a charged particle optical system (20) for manipulating the charged particle beam, such as irradiating the sample with a charged particle detection system (50). The diffractometer 1 comprises a sample holder 30 for holding the sample and a manipulator operatively coupled to the sample holder 30 for positioning the sample 31 relative to the beam axis 11; 40) is further included. The manipulator 40 comprises a rotation stage 41 for inclining the sample holder 30 with respect to a charged particle beam incident about an inclination axis 44 and the sample holder in at least a plane perpendicular to the inclination axis 44 ( and a multi-axis translation stage 42 for moving 30). The multi-axis translation stage 42 is operatively coupled between the sample holder 30 and the rotation stage 41 such that the multi-axis translation stage 42 is in the rotation system of the rotation stage 41 and the sample holder Reference numeral 30 is in the movement system of the multi-axis translation stage 42 .