Air volume control system for fan filter unit

摘要

The present invention relates to an air flow control system for a fan filter unit applied to a clean room in which dust, temperature, humidity, air pressure and other contamination are to be controlled and controlled, and the upper chamber, lower chamber, airflow section, temperature control module, and fan filter It consists of a unit, a grating and a fan filter controller, and the fan filter controller has a preset fan rotation speed value in a steady state according to the filter differential pressure, and the fan rotation speed is set in the steady state according to the filter differential pressure measured by the pressure sensor module in real time. of the fan rotation speed, and a pressure measuring tube is provided to measure the filter differential pressure and external static pressure by connecting the fan filter unit and the inside of the clean room from the pressure sensor module, and the installation position of the pressure measuring tube is a sprinkler By becoming the same as the fire pipe installed for water supply, maintenance is possible without disassembling the fan filter unit. An object of the present invention is to provide an airflow control system for a fan filter unit that can reduce installation costs.