DIAPHRAGM FOR MEMS MICROPHONE, AND MEMS MICROPHONE

摘要

The present application provides a diaphragm for an MEMS microphone. Said diaphragm comprises a square main body portion and first anchor portions extending outward from the four corners of the main body portion. Each first anchor portion comprises a connection portion extending outward from the main body portion and a support portion extending outward from the connection portion. The main body portion extends outward to form an outer film, and the connections between the outer film and the connection portions form rounded corners. In the present application, rounded corners are provided at the connections between the main body portion of the diaphragm and the first anchor portions so as to increase the area of the diaphragm, thereby achieving the goal of enhancing the sensitivity of the MEMS microphone.