PRESSURE SENSOR ELEMENT, PRESSURE SENSOR MODULE, AND SIGNAL CORRECTION METHOD FOR SAME

摘要

The present invention pertains to a pressure sensor element that detects a change in capacitance between electrodes. A pressure sensor element 1 comprises an electrically insulating substrate 10, a base electrode layer 20, spacer parts 30, 31, a guard electrode layer 30A, a membrane plate 40, and the like. A sensing electrode S serving as a sensing electrode section and monitoring electrodes M1-M4 serving as a monitoring electrode section are installed on the membrane plate 40 so as to face the substrate 10. The monitoring electrodes M1-M4 detect stress and strain generated in the spacer parts 30, 31 when mounted on a circuit board.　Through such a configuration, high measurement precision can be realized even after mounting on a circuit board.