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BIREFRINGENCE MEASUREMENT DEVICE AND BIREFRINGENCE MEASUREMENT METHOD

机译:双折射测量装置和双折射测量方法

摘要

The present invention has a problem aiming to provide a birefringence measurement device capable of measuring a two-dimensional distribution of birefringence in a measurement target in real time and in detail using a simple configuration without a rotating mechanism. A birefringence measurement device 1A according to the present invention includes light flux generating means 2 for generating light flux L1, light flux irradiating means 3, 4, or 5 for irradiating a measurement target 20 with the light flux L1 in a predetermined polarization state, an imaging optical system 10 for forming an image from light flux L4 transmitted through the measurement target 20, a polarization/diffraction grating 8 disposed in a position within the imaging optical system 10, image pickup means 12 for generating a light-dark signal related to brightness of the image formed by the imaging optical system 10, and output means for outputting information regarding a phase difference for the light flux L4, the phase difference resulting from the transmission through the measurement target 20 and being determined on the basis of the light-dark signal, and the image pickup means 12 generates the light-dark signal for an image based on at least one beam of diffracted light L7 from among a plurality of beams of diffracted light produced by the polarization/diffraction grating 8.
机译:本发明的旨在提供一种能够在实时测量测量目标中的双折射在测量目标中的二维分布的问题的问题,并且使用简单的配置在没有旋转机构的情况下详细的。根据本发明的双折射测量装置1a包括用于产生光束L1,光磁通照射装置3,4或5的光通量产生装置2,用于以预定的偏振状态将测量目标20用光通量L1照射测量目标20,用于从通过测量目标20传输的光束L4形成图像的成像光学系统10,偏振/衍射光栅8设置在成像光学系统10内的位置,图像拾取装置12,用于产生与亮度相关的浅暗信号由成像光学系统10形成的图像,以及输出装置,用于输出关于光通量L4的相位差的信息,通过通过测量目标20的传输产生的相位差并基于光暗确定信号,并且图像拾取装置12基于至少一个衍射光L7 F产生用于图像的光暗信号在由偏振/衍射光栅8产生的多个衍射光的多个衍射光中的ROM。

著录项

  • 公开/公告号EP3187856B8

    专利类型

  • 公开/公告日2022-01-12

    原文格式PDF

  • 申请/专利权人

    申请/专利号EP20150835242

  • 发明设计人 EMOTO AKIRA;OTANI NAOKI;FUKUDA TAKASHI;

    申请日2015-08-11

  • 分类号G01N21/23;

  • 国家 EP

  • 入库时间 2022-08-24 23:19:58

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