FOREIGN SUBSTANCE/DEFECT INSPECTION DEVICE, IMAGE GENERATION DEVICE IN FOREIGN SUBSTANCE/DEFECT INSPECTION, AND FOREIGN SUBSTANCE/DEFECT INSPECTION METHOD

摘要

According to the present invention, a light source and one pixel unit formed of at least one light reception element among a light reception element array (photodiode array) are provided in a one-to-one correspondence, and a light beam is detected from at least one light reception element (one pixel unit) corresponding to the light source, only when the light source emits light. Therefore, only one collimated or further substantially condensed light beam is incident into "a foreign substance/defect" in an object to be inspected, and only scattered light can be separated by the light reception element and be detected. Accordingly, even when an object to be inspected has a light scattering property and is thick, "a foreign substance/defect" can be detected with a good signal to noise ratio (crosstalk is extremely low).