Verbund nanoimprint lithograph and its operation

摘要

Composite nanoimprint lithograph, characterized in that it comprises a base support (1) to which a work table (2) is attached, on the movable table top of which a vacuum clamping device (3) is arranged, on which a base material (4) passes Vacuum adsorption adheres, which is evenly coated with an embossing material (5) and above which there is an associated embossing module which is connected to a vertical movement mechanism which comprises a guide column (16) attached to the base support (1) perpendicular to this, which carries a movable plate (14), on the underside of which the embossing module is connected and on the upper side of which a drive device is connected, the embossing module comprising an embossing assembly and a curing assembly arranged behind the embossing assembly, which embossing assembly comprises a roller (9), on the outer surface of which a soft one Composite tool (8) adheres by vacuum adsorption and its outer surface with an elastic material sch icht is encased, wherein the soft composite tool (8) is provided with a flexible material layer on the side on which it comes into contact with the roller (9), and the roller (9) via a connection bracket (13) with the movable plate (14) is connected and comprises a roller body (902) which is connected at a first end to a power device and at a second end with a plurality of evenly distributed gas inlet bores (903), each of which is provided with a hard line (7) an associated gas outlet opening of a rotatable section of a rotary connection piece (602), both the pressure line and the vacuum line being connected to a connecting bore (601) of a fixed section of the rotary connection piece (602), which connection bore (601) is in turn connected to the gas outlet opening .