COMPENSATION OF WAR EFFECTS IN A TRAINING SYSTEM

摘要

The present invention concerns the arrangement of an optical imaging device for micrography, in particular for the use of light in the extreme UV range (EUV),with a first support structure (111.1) and a second support structure (111.2),where the first support structure (111.1) supports at least one optical element (107.2) of the imaging device via an active bearing control (110) of a control device (109). The first support structure (111.1) supports the second support structure (111.2) via a majority of support spring devices (113.1) of a vibration decoupling device (113), with the support spring devices (113.1) acting kinematically parallel to each other. Each of the support spring devices (113.1) defines a support direction as well as a support length along the support direction. The second support structure (111.2) supports a measuring device (109.1) of the control device (109),which is connected to the storage device (110). The measuring device (109.1) shall provide at least one optical element for the position and/or orientation (107.2) with respect to a reference (112) in at least one degree of freedom in the space representative of the mass information to the bearing control device (110). In a first mode of operation, the bearing control (110) provides a first set state of the position und/or orientation of at least one optical element (107.2) with respect to the reference (112) in at least one degree of freedom depending on the brass information. The control device (109) shall record at least one degree of freedom representative relative change information between the first support structure (111.1) and the second support structure (111.2).where the relative bearing change is due in particular to a length change of at least one of the support spring devices (113.1) along its support force direction. The control device (109) has a creep compensation mode,in which, for the bearing control device (110), a corrected second set state of position and/or orientation of at least one optical element (107.2) is set for the reference (112) in relation to the relative bearing change information. The control device (109) uses the second set state instead of the first set state in a second mode following creep compensation mode.