Lighting device for inspection measurement and inspection measurement system and inspection measurement method

摘要

(Problem) In the object light returned from the object surface to be inspected, there is little direct light component corresponding to the specularly reflected light or regular transmitted light to the irradiated light, and when the contrast information is obtained mainly by observing the scattered light component, If the irradiation conditions such as the inclination of the optical axis of the irradiated light for each point are not kept constant, the inclination direction and the inclination angle in a micro area near each point of the object plane are quantitatively determined by the optical properties of the scattered light and the change in contrast. It becomes difficult to reflect quantitatively, Also, When there are many direct light components in the object light returned from the object surface to be inspected, and when the contrast information is mainly obtained by observing the direct light component, the surface properties of the object surface have a relatively large three-dimensional shape, for example When the inclination of each microsurface on the surface becomes more than a certain level, the optical axis inclination of the direct light, which is the specular reflection of the irradiated light among the object lights returned from the object surface, increases, and goes out of the range of the observation solid angle formed by the observation optical system from above the object. As a result, the direct light from the inclined surface cannot be captured by the observation optical system. In the direct light returned from the object, the light and shade information of the part is not obtained, and the surface shape of the object surface is continuously and quantitatively obtained. things become difficult (Solution Means) The present invention has been made in view of the above problems, and is irradiated with irradiation light capable of forming the same irradiated solid angle for each point on the object plane in the observation range of the object to be inspected, and the object plane In the case of acquiring the surface shape of the object surface from the contrast information by observing scattered light components other than the direct light corresponding to the specularly reflected light or the regular transmitted light with respect to the irradiated light mainly among the object light returned from the object surface, The inclination of the microsurface in the vicinity of each point is quantitatively reflected as a change in the optical properties of the scattered light component and the contrast information, or, In the case of acquiring the surface shape of the object plane by obtaining contrast information generated mainly by a change in the inclusion relationship between the solid angle formed by the direct light and the observation solid angle formed by the observation optical system for observing the direct light, the angle of the object plane The inclination of the micro-surface in the vicinity of a point becomes at least 1/2 of the sum of the plane half angles of the irradiation solid angle and the observation solid angle with respect to the point, and the observation optical system returns the light and shade information by the direct light returned from the object plane continuously. To provide an inspection measurement system and inspection measurement method that enable obtaining the relative relationship of three-dimensional shape information such as height, inclination, and inclination direction with respect to the surface shape of a region adjacent to a region that cannot be obtained by for the purpose of In the irradiation light irradiated to the inspection object, In the case of observing scattered light among the object light returned from the inspection object, If the illuminance of the micro-surface in the vicinity of each point on the object surface is the same in the inclination direction or inclination angle of the micro-surface, the same illuminance distribution is obtained, Irradiation of the irradiation light that quantitatively changes the light properties and contrast of scattered light components among the object light returned from the microsurface with respect to a change in the inclination direction or inclination angle of the microsurface, and obtains a three-dimensional shape of the object face to form a three-dimensional angle, or, In the case of observing the direct light among the object light returned from the inspection object, In a discontinuous area where the change in the 3D shape of the object surface is large and the inclination of a minute area near each point on the object surface cannot be continuously acquired as contrast information of object light returned from each point, Paying attention to the fact that there is a specific area in which the irradiation solid angle of the irradiation light to each point on the object plane in the vicinity of the discontinuous area is not reflected in the solid angle of the direct light corresponding to the specular reflection light of the object light returned from that point, Based on the novel idea of making it possible to acquire the three-dimensional shape of the discontinuous area by the contrast information of the object light, paying attention to the change in the solid angle of the direct light with respect to the irradiation solid angle and the change in the object light in the discontinuous area. will be.