首页> 外国专利> HALF-LEATHER BUILDING EQUIPMENT WITH WATER FROM HARD MATERIALS ISSUED IN MOTOR HECKS WITH WATER FROM WEIGHT MATERIALS

HALF-LEATHER BUILDING EQUIPMENT WITH WATER FROM HARD MATERIALS ISSUED IN MOTOR HECKS WITH WATER FROM WEIGHT MATERIALS

机译:半皮革建筑用水从电机击中的硬质材料,用重量材料

摘要

A stacked semiconductor device encompasses a mother-plate (81) having a mounting-main surface and a bottom-main surface, an onboard-element (Xij) having a connection face facing to the mounting-main surface, a parent bump (11, 14a, 14b, 15, 16, 31+32+33) provided on the mother-plate (81), having a mother-site wall made of a layer of conductor, the mother-site wall being perpendicular to the mounting-main surface, and a repair bump (21+22+23, 24+25+26, 27+28(+29), 41) provided on the onboard-element (Xij) at a side of the connection face, having a repair-site wall made of a layer of conductor having different hardness from the mother-site wall, the repair-site wall being perpendicular to the connection face, the repair bump (21+22+23, 24+25+26, 27+28(+29), 41) and the parent bump (11, 14a, 14b, 15, 16, 31+32+33) being configured to bite each other at an intersection between the mother-site wall and the repair-site wall conductor. At least one of the mother-site and repair-site walls may include a laminated structure of two or more conductive layers (21, 22, 23, 24, 25, 26, 27, 28, 29, 31, 32, 33), adjacent conductive layers (21, 22, 23, 24, 25, 26, 27, 28, 29, 31, 32, 33) in the laminated structure having different hardness. The crimping process of the repair bump (21+22+23, 24+25+26, 27+28(+29), 41) and the parent bump (11, 14a, 14b, 15, 16, 31+32+33) can be achieved with a relatively small pressure, the crimping can thus suppress the deformation of most portions of bumps (11, 14a, 14b, 15, 16, 31+32+33; 21+22+23, 24+25+26, 27+28(+29), 41) other than the portions at solid-phase diffusion bonding. Consequently, after the crimping process with weak force so as to establish a provisional connection, and after electrical evaluation, if there is a defect, the defective onboard-component (2) can be replaced with a further onboard-component (2) and another provisional connection may be executed again with less deformed portions of bumps (11, 14a, 14b, 15, 16, 31+32+33; 21+22+23, 24+25+26, 27+28(+29), 41), wherein this process may be repeated until electrical evaluation test is passed. Non-provisional (final) joining may then be performed upon application of increased pressure.
机译:堆叠的半导体器件包括具有安装主表面和底部主表面的母板(81),底座元件(Xij),该内侧元件(Xij)具有面向安装主表面的连接面,父凸块(11,图14A,14B,15,16,31 + 32 + 33)设置在母板(81)上,具有由一层导体制成的母部壁,母部位壁垂直于安装主表面,以及在连接面的侧面的船上元件(Xij)上设置的修复凸块(21 + 22 + 23,24 + 25 + 25 + 26,27 + 28(+29),41),其具有修复现场由母部壁的一层导体制成的壁,修复部位壁垂直于连接面,修复凸块(21 + 22 + 23,24 + 25 + 26,27 + 28(+ 29),41)和父凸块(11,14a,14b,15,16,31 + 32 + 33)被配置为在母部壁和修复现场壁导体之间的交叉处彼此咬合。至少一个母部和修理部门壁可以包括两个或更多个导电层的层叠结构(21,22,23,24,25,26,27,28,29,31,32,33),在具有不同硬度的层叠结构中,相邻的导电层(21,22,23,24,25,26,27,28,29,31,32,33)。修复凸块(21 + 22 + 23,24 + 25 + 26,27 + 28(+29),41)和父凸块(11,14a,14b,15,16,31 + 32 + 33的压接过程通过相对较小的压力可以实现,压接可以抑制大部分凸块(11,14a,14b,15,16,31 + 32 + 33; 21 + 22 + 23,24 + 25 + 26的变形除了固相扩散键合的部分以外,27 + 28(+29),41)。因此,在用弱力的压接过程之后,以建立临时连接,并且在电评估之后,如果存在缺陷,则可以用进一步的车载组件(2)替换缺陷的车载组件(2)。临时连接可以再次执行,凸块的较小部分(11,14a,14b,15,16,31 + 32 + 33; 21 + 22 + 23,24 + 25 + 26,27 + 28(+29),41 ),其中可以重复该过程直到通过电评估测试。然后可以在施加增​​加的压力时进行非临时(最终)连接。

著录项

  • 公开/公告号EP3926673A4

    专利类型

  • 公开/公告日2021-12-22

    原文格式PDF

  • 申请/专利权人 TOHOKU-MICROTEC CO. LTD;

    申请/专利号EP20200204653

  • 发明设计人 MOTOYOSHI MAKOTO;

    申请日2020-10-29

  • 分类号H01L23/485;H01L21/603;H01L25/075;H01L27/146;

  • 国家 EP

  • 入库时间 2022-08-24 22:57:31

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