Single Cantilever Beam Gas Sensors, Sensor Arrays and Methods for Manufacturing Sensors

摘要

The present invention discloses a single cantilever beam gas sensor, comprising a silicon substrate, a support film, a heating resistor, an isolation film and a detection electrode stacked sequentially, the gas sensor having a "T" shape, a matrix structure and a cantilever beam structure, wherein a gas-sensitive material is installed on an end of the cantilever beam structure. The present invention also provides a sensor array comprising a single cantilever beam gas sensor, and provides a method for manufacturing the gas sensor, comprising: (1) silicon substrate selection; (2) support film production; (3) manufacture of heating resistors; (4) manufacture of isolation films; (5) manufacturing of the detection electrode; (6) thin film release; (7) loading gas-sensitive material; Advantages of the present invention are that the sensor has a low power consumption, a small size, a high degree of integration, a simple production process, easy positioning, and effectively improves production efficiency.