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MANIPULATOR, MANIPULATOR ARRAY, CHARGED PARTICLE TOOL, MULTIBEAM CHARGED PARTICLE TOOL, AND METHOD OF MANIPULATING A CHARGED PARTICLE BEAM
MANIPULATOR, MANIPULATOR ARRAY, CHARGED PARTICLE TOOL, MULTIBEAM CHARGED PARTICLE TOOL, AND METHOD OF MANIPULATING A CHARGED PARTICLE BEAM
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机译:机械手,操纵器阵列,带电粒子工具,多射流带电粒子工具和操纵带电粒子束的方法
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摘要
A manipulator for manipulating a charged particle beam in a projection system, the manipulator comprising a substrate having opposing major surfaces in each of which is defined an aperture and a through-passage having an interconnecting surface extending between the apertures; wherein the interconnecting surface comprises one or more electrodes; the manipulator further comprising a potential divider comprising two or more resistive elements connected in series, the potential divider comprising an intermediate node between each pair of adjacent resistive elements, wherein at least one resistive element is formed within the substrate so as to extend between the opposing major surfaces; wherein the intermediate node is electrically connected to at least one of the one or more electrodes.
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