FERRITE CORE FOR INDUCTIVELY COUPLED PLASMA AND INDUCTIVELY COUPLED PLASMA REACTOR WITH THE SAME

摘要

According to the present invention, in the ferrite core disposed to surround the plasma reaction space of the reaction chamber for inductively coupled plasma having a first connector and a second connector, the first connector in the form of a rectangular ring surrounding the first connector ring part; and a second ring portion in the form of a rectangular ring surrounding the second connection tube, wherein one edge of the first ring portion and one edge of the four sides of the second ring portion share the first ring portion with each other. A ferrite core for inductively coupled plasma is provided, in which a portion and the second annular portion are formed.