Apparatus and method of defect inspection using structure prediction based on deep learning

摘要

generating a plurality of masking images by masking a plurality of regions of an original image, respectively, inputting each of the masking images to a structure inference unit to obtain a plurality of output images inferred from the plurality of masking images; and extracting masked regions from each of the output images to generate the respective output images, combining a plurality of the extracted regions with each other to generate one inferred image, and the inferred image and the original image Discloses a defect inspection method comprising the step of determining whether a defect exists in the original image based on a difference between the two.