Compositions comprising ammonia activated siloxanes for avoiding pattern collapse when processing patterned materials having line spacing dimensions of 50 nm or less

摘要

A non-aqueous composition comprising: (a) an organic protic solvent, (b) ammonia, and (c) at least one additive of formula (I) or (II), during the meal, R 1 is H R 2 is selected from H, C 1 to C 10 alkyl, C 1 to C 10 alkoxy, C 6 to C 10 aryl, and C 6 to C 10 aroxy; R 3 is selected from R 2 , R 4 is selected from C 1 to C 10 alkyl, C 1 to C 10 alkoxy, C 6 to C 10 aryl, and C 6 to C 10 aroxy; R 10 , R 12 are independently selected from C 1 to C 10 alkyl and C 1 to C 10 alkoxy; m is 1, 2 or 3; n is 0 or an integer from 1 to 100.