首页> 外国专利> III-NITRIDE GROOVED GATE NORMALLY-OFF-TYPE P-CHANNEL HEMT DEVICE AND MANUFACTURING METHOD THEREFOR

III-NITRIDE GROOVED GATE NORMALLY-OFF-TYPE P-CHANNEL HEMT DEVICE AND MANUFACTURING METHOD THEREFOR

机译:III-氮化物沟槽栅极常关型P沟道HEMT器件及其制造方法

摘要

Disclosed are an III-nitride grooved gate normally-off-type P-channel HEMT device and a manufacturing method therefor. The HEMT device comprises a double-heterojunction structure formed by a first semiconductor, a second semiconductor and a third semiconductor, wherein the double-heterojunction structure has double-2-dimensional hole gases (2DHG); the third semiconductor has a band gap smaller than that of the second semiconductor, with the band gap being easily removed by using photoelectrochemical corrosion (PEC) technology selected according to an energy band, so as to form a groove structure; and the groove structure and a gate electrode structure are arranged in a matching manner, such that 2-dimensional hole gas in an area inside the second semiconductor which corresponds to the bottom of a gate electrode can be depleted. By means of the present application, a grooved gate normally-off-type P-channel HEMT device with a large output current and low on-resistance can be effectively realized.
机译:公开了是一种III-氮化物沟槽栅极常型P沟道HEMT装置及其制造方法。 HEMT装置包括由第一半导体,第二半导体和第三半导体形成的双异质结结构,其中双异质结结构具有双二维空穴气体(2DHG);第三半导体具有小于第二半导体的带隙,通过使用根据能带选择的光电化学腐蚀(PEC)技术容易地除去带隙,从而形成凹槽结构;并且凹槽结构和栅电极结构以匹配方式布置,使得可以耗尽对应于栅电极的底部的第二半导体内部的2维空穴气体。借助于本申请,可以有效地实现具有大输出电流和低导通电阻的带槽栅极常型P沟道HEMT装置。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号