ABNORMALITY/IRREGULARITY CAUSE IDENTIFYING APPARATUS, ABNORMALITY/IRREGULARITY CAUSE IDENTIFYING METHOD, AND ABNORMALITY/IRREGULARITY CAUSE IDENTIFYING PROGRAM

摘要

The present invention improves abnormality/irregularity cause identifying performance in a production facility. This abnormality/irregularity cause identifying apparatus is provided with: a process data acquisition unit that reads process data ongoingly outputted by a plurality of sensors provided to a production facility for performing a batch step for processing process targets on a unit-by-unit basis for each predetermined unit to be processed and a continuous step for continuously processing the process targets after the batch step; a pre-processing unit that forms association between a range of a completion timing of the batch step and an output timing of the process data in the continuous step, on the basis of a retention time of the process targets in the production facility; an abnormality determination unit that calculates a degree of abnormality by using the process data in the batch step and the process data in the continuous step, the association between which has been formed by the pre-processing unit; and a cause diagnosis unit that, regarding the process data outputted by the plurality of sensors, determines whether a degree of abnormality calculated by the abnormality determination unit satisfies a predetermined criterion.