POWER SUPPLY SHUTOFF DEVICE AND POWER SUPPLY SHUTOFF METHOD

摘要

This power supply shutoff device is provided with a movable unit, a drive unit, a power supply device, a power distribution unit, a power supply circuit, and a supply control unit. The movable unit can travel on a travel path provided along a substrate production line in which a plurality of work machines for substrate, which perform predetermined work for a substrate, are installed side by side. The drive unit is provided in the movable unit and uses supply power supplied by non-contact power supply from the work machines for substrate to cause the movable unit to travel. The power supply device generates power. The power distribution unit distributes the power generated by the power supply device to each of the plurality of work machines for substrate. The power supply circuit is provided in each of the plurality of work machines for substrate and generates, by using the power distributed via the power distribution unit, the supply power to be supplied to the drive unit. The supply control unit stops the supply of power to the power supply circuit when drive power for driving the work machines for substrate is shut off in at least one of the plurality of work machines for substrate.