CMP PAD CONSTRUCTION WITH COMPOSITE MATERIAL PROPERTIES USING ADDITIVE MANUFACTURING PROCESSES

摘要

Embodiments of the present disclosure generally provide polishing pads comprising a composite pad body, and methods for forming such polishing pads. One embodiment provides a polishing pad comprising a composite pad body. The composite pad body may include one or more first features formed of a first material or a first material composition; and one or more second features formed of a second material or second material composition, wherein the one or more first features and the one or more second features comprise a first material or first material composition and a second material or second material composition. It is formed by depositing a plurality of layers comprising