Metal-Insulation System Nanogranular Thin Film and Thin Film Magnetic Sensor

摘要

To provide a novel metal/insulator nano-granular thin film with a high heat resistance, and a thin film magnetic sensor arranged by use thereof.SOLUTION: A metal/insulator nano-granular thin film comprises: ferromagnetic particles; and an insulative matrix made of MgAlO(1.6≤x≤2.4 and 3.2≤y≤4.8) filled around the ferromagnetic particles. The ferromagnetic particles are preferably of a (FeCo)Zalloy (where Z represents B and/or Si, 0≤x≤1 and 0≤y≤20), a CoFe(AlSi) alloy (where 0≤x≤1), a CoMnZ alloy (where Z represents at least one element selected from a group consisting of Al, Si and Ge) or an FeCrSi alloy. A thin film magnetic sensor comprises the metal/insulator nano-granular thin film.SELECTED DRAWING: Figure 1