LIBS High Resolution Laser Processing Unit with LIBS Measurements

摘要

Disclosed is a high-resolution laser processing apparatus capable of measuring LIBS. According to one aspect of this embodiment, a light source irradiating laser light and a plurality of laser light irradiated from the light source are separated, and a part of the separated laser light is transmitted through an optical system that varies the path and focal length of the optical system. It provides a laser processing apparatus comprising: an objective lens for focusing a plurality of laser beams in a direction in which a sample to be processed is located, and a measuring unit for measuring a spectral signal generated from the sample.