WAFER CENTER DETECTION METHOD AND WAFER CENTER DETECTION DEVICE

摘要

To provide a wafer center detection method and apparatus that are able to improve accuracy in detecting the center of a wafer.SOLUTION: A wafer center detection method includes: a wafer holding step; a positioning step of positioning an imaging unit 20 and a holding table 10 so that an outer edge 110 of a wafer 100 is imaged; an imaging step of, while rotating the holding table 10 within an arbitrary range of angle, imaging the outer edge 110 by means of the imaging unit 20 and recording a plurality of images in association with a rotation angle; an outer edge detection step of detecting a position of the outer edge 110 in each of these images; a coordinate acquisition step of acquiring coordinates of the outer edge 110 of the wafer 100 from the position of the outer edge 110 of each image and the rotation angle of the holding table 10 during imaging; and a central coordinate calculation step of calculating an approximate circle from the coordinates of the outer edges 110 and acquiring center coordinates of the wafer 100.SELECTED DRAWING: Figure 1